Book Chapters
Lithography
Sang-Kon Kim, “A Method for Optical
Proximity Correction of Thermal Processes: Orthogonal Functional Method ”
in Lithography, ed. Michael Wang, INTECH Press, 2010, pp. 131-161
Lithography
Edited by Michael Wang
ISBN 978-953-307-064-3
656 pages
February 2010
Books